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Plasma etching
Hardback
€308.13
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- Book Synopsis
- The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
- About The Author
- Professor Minoru Sugawara, Hachinohe Institute of Technology, Hachinohe-city, Aomori 031, Japan. Fax: (0) 178 25 1430
- Product Details
-
- ISBN
- 9780198562870
- Format
- Hardback
- Publisher
- Oxford University Press, (28 May 1998)
- Number of Pages
- 347
- Weight
- 743 grams
- Language
- English
- Dimensions
- 242 x 163 x 23 mm
- Series:
- See all books in this series
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